The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Nov. 21, 2005
Robert John Wilby, Nailsea, GB;
Robert John Wilby, Nailsea, GB;
Metryx Limited, Bristol, GB;
Abstract
In order to determine the dielectric constant of a layer deposited on a semiconductor wafer (), the density of the layer is obtained. To obtain that density, the wafer () without the layer is weighed in a weighing chamber () in which a weighing pan () supports the wafer on a weighing balance. The weight of the wafer is determined taking into account the buoyancy exerted by the air on the wafer (). Then the layer is deposited on the wafer () and the weighing operation repeated. Alternatively a reference wafer may be used. If the material of the layer is known, the weight of the layer can be used to derive its density using a thickness measurement. Alternatively, if the density is known, the thickness can be obtained.