The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Jun. 10, 2005
Applicants:
Dae-jin Jeon, Gyeonggi-Do, KR;
Jae-ho Yang, Daejeongwangyeoksi, KR;
Inventors:
Dae-Jin Jeon, Gyeonggi-Do, KR;
Jae-Ho Yang, Daejeongwangyeoksi, KR;
Assignee:
LG.Philips LCD Co., Ltd, Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/1341 (2006.01); G02F 1/13 (2006.01); G02F 1/136 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for forming a thin film on a substrate includes a chamber having a gas inlet, an upper electrode in the chamber, the upper electrode having a plurality of nozzles, a lower electrode in the chamber for supporting the substrate thereon, the lower electrode being spaced apart from the upper electrode, and a selective injection plate above the upper electrode, the selective injection plate including a selective injection valve for selectively concentrating a gas supplied through the gas inlet onto a portion of the upper electrode.