The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Jan. 31, 2006
Applicants:
Sung-chan Cho, Anyang-si, KR;
Suk-woo Lee, Seoul, KR;
Inventors:
Sung-chan Cho, Anyang-si, KR;
Suk-woo Lee, Seoul, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and related method for testing a semiconductor device are provided. The apparatus includes a unit depositing charge on an insulating layer formed on a semiconductor substrate, a unit measuring leakage current from the bottom surface of the semiconductor substrate, and a unit measuring surface voltage associated with the insulating layer.