The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Nov. 07, 2003
Applicants:
Alan G. Taylor, London, GB;
Christopher J. Barnett, Bromley, GB;
David R. Klug, London, GB;
Ian P. Mercer, Keymer, GB;
Inventors:
Alan G. Taylor, London, GB;
Christopher J. Barnett, Bromley, GB;
David R. Klug, London, GB;
Ian P. Mercer, Keymer, GB;
Assignee:
Powerlase Limited, Crawley, West Sussex, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05H 1/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.