The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7338911 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 04, 2008

Filed:

Dec. 28, 2005
Applicant:

Shusaku Kido, Izumi, JP;

Inventor:

Shusaku Kido, Izumi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for forming a structure formed by etching which is typified by a contact hole in the semiconductor and a method for manufacturing a display device using the structure. The etching method includes at least, forming an organic mask having a first opening portion and a second opening portion by patterning an organic film which includes either one of an organic film and a film with the addition of organic solvent and is located on a constituent part to be etched, and forming a transformed organic mask by dissolving the organic mask in contact with organic solvent and reflowing.


Find Patent Forward Citations

Kido, Shusaku. (2008). Method for etching and for forming a contact hole using thereof (U.S. Patent No. 7338911). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7338911

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