The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 04, 2008

Filed:

Jul. 01, 2004
Applicants:

Jayanta S. Kapat, Oviedo, FL (US);

Linan an, Oviedo, FL (US);

Sanjeev Bharani, Orlando, FL (US);

Inventors:

Jayanta S. Kapat, Oviedo, FL (US);

Linan An, Oviedo, FL (US);

Sanjeev Bharani, Orlando, FL (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 25/40 (2006.01); G01K 17/06 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Novel micro electro mechanical systems (MEMS)-based sensors for use in ultra-high temperature environments are disclosed. The MEMS-based sensors are derived from a class of polymer-derived ceramics selected from the group consisting of SiCN, SiBCN and SiAlCN. The materials of construction are such that, the sensors are capable of accurate, real-time, on-line and in-situ monitoring, suppression of combustion oscillations and detailed measurements in operating structures that have temperatures of from about 1500° K to about 2000° K, extreme pressures/turbulence and harsh chemical off gases. When the novel sensors are mounted on a hot gas path wall, such as, at a combustor exit, there can be a continuous monitoring of pressure pulses/oscillations, wall shear stress, temperature and surface heat flux.


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