The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Oct. 31, 2002
Applicant:
Richard J. Markle, Austin, TX (US);
Inventor:
Richard J. Markle, Austin, TX (US);
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 11/30 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system includes a process tool for processing a workpiece, a process controller, and a fault monitor. The process controller is configured to determine a control action for updating an operating recipe of the process tool. The fault monitor is configured to determine at least one fault detection threshold based on the control action. A method includes determining a control action for updating an operating recipe of a process tool and determining at least one fault detection threshold based on the control action.