The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
May. 31, 2005
Naoki Yamada, Tokyo, JP;
Shinichi Tanaka, Tokyo, JP;
Naoki Yamada, Tokyo, JP;
Shinichi Tanaka, Tokyo, JP;
Adeka Corporation, Tokyo, JP;
Abstract
The thin film-forming material of the present invention comprises a bis(β-diketonato)zinc compound that is liquid at 25° C. and is suitable for forming a zinc-containing thin film. By using the thin film-forming material, a thin film can be produced with stable film-forming rate or stable film composition control without suffering from problems of raw material gas suppliability and in-line raw material transport. Preferred (β-diketonato)zinc compounds are bis(octane-2,4-dionato)zinc and bis(2,2dimethyl-6-ethyldecane-3,5-dionato) zinc.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile