The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Jul. 31, 2006
Applicants:
Steven Verhaverbeke, San Francisco, CA (US);
J. Kelly Truman, Morgan Hill, CA (US);
Alexander Ko, Sunnyvale, CA (US);
Rick R. Endo, San Carlos, CA (US);
Inventors:
Steven Verhaverbeke, San Francisco, CA (US);
J. Kelly Truman, Morgan Hill, CA (US);
Alexander Ko, Sunnyvale, CA (US);
Rick R. Endo, San Carlos, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/00 (2006.01); B08B 3/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for wet processing individual wafers comprising; a means for holding the wafer; a means for providing acoustic energy to a non-device side of the wafer; and a means for flowing a fluid onto a device side of the wafer.