The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
May. 09, 2006
Raffaele Correale, Turin, IT;
Raffaele Correale, Turin, IT;
Varian S.p.A., Leini, Turin, IT;
Abstract
A pressure sensor made of a wafer with a pair of parallel silicon layers and a silicon oxide layer there between, comprises a vibrating microassembly formed as a silicon beam, which is arranged in a plane perpendicular to the silicon layers and fastened to a supporting base. A control devise is formed from a portion of one of the silicon layers and is driven by a signal of a predetermined frequency component, which under absolute vacuum conditions makes the microassembly to freely oscillate at a known frequency and amplitude relative to the supporting base within a cavity formed by removing the silicon oxide layer. An optical detection system detects deviations of the frequency and/or amplitude of oscillation of the microassembly from the known frequency and/or amplitude.