The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2008
Filed:
Mar. 06, 2006
Toru Kitamoto, Kyoto, JP;
Kenji Kamei, Kyoto, JP;
Hidekazu Inoue, Kyoto, JP;
Tetsuya Hamada, Kyoto, JP;
Toru Kitamoto, Kyoto, JP;
Kenji Kamei, Kyoto, JP;
Hidekazu Inoue, Kyoto, JP;
Tetsuya Hamada, Kyoto, JP;
Abstract
A substrate processing system comprises a substrate processing apparatus and a support computer, which are connected to a network respectively. Updated countermeasure information is accumulated in the support computer by a system administrator. When the substrate processing apparatus causes a failure, content of the failure is displayed on a display part while an alarm processing part controls process according to an alarm definition file. Further, a countermeasure information acquisition part requires updated countermeasure information against the failure from the support computer. In response to this, countermeasure information distribution part of the support computer transmits updated countermeasure information. Thus, updated countermeasure information can be read instantly when a failure occurs.