The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2008
Filed:
Oct. 31, 2002
Hidetoshi Wakamatsu, Miyagi, JP;
Hidetoshi Wakamatsu, Miyagi, JP;
Oki Electric Industry Co., Ltd., Tokyo, JP;
Abstract
The method is intended to detect with high sensitivity and high accuracy chemically contaminating impurities in which there exist chemically contaminating impurity constituents of basic series, acidic series, and organic substance series, in gaseous and particle states, and constituents of compounds thereof, contained in air inside a clean room, as constituents having every property. To this end, ions composed of various cations and anions, constituting the chemically contaminating impurities in fine particle, gaseous, or molecular state, are caused to continuously undergo dissolution reaction and dissociation reaction in a solution in sequence from those constituting salts having strong solubility or strong dissociative tendency.