The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2008
Filed:
Mar. 04, 2004
Mitsuhide Nogami, Hachioji, JP;
Eiji Miyamoto, Hachioji, JP;
Mitsuhide Nogami, Hachioji, JP;
Eiji Miyamoto, Hachioji, JP;
Sekisui Chemical Co., Ltd., Osaka, JP;
Abstract
A nozzle head NH of a plasma processing apparatus comprises an annular inner holder, an annular inner electrodesurrounding this holder, an annular outer electrodesurrounding this electrode, and an annular outer holdersurrounding this electrode. The inner holderis provided with a plurality of boltsspacedly arranged in the peripheral direction and adapted to push the inner electroderadially outwardly. The outer holderis provided with a plurality of boltsspacedly arranged in the peripheral direction and adapted to push the outer electroderadially inwardly. Owing to this arrangement, the operation for disassembling, assembling and centering the annular electrodescan be carried out with ease.