The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7331230 B1

PDF
Full Text
Expired
Date of Patent:
Feb. 19, 2008

Filed:

Dec. 24, 2004
Applicants:

Tokuhisa Takeyari, Fukaya, JP;

Yoshio Ikeda, Oyama, JP;

Inventors:

Tokuhisa Takeyari, Fukaya, JP;

Yoshio Ikeda, Oyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/12 (2006.01);
U.S. Cl.
CPC ...
Abstract

There is provided a semiconductor-type three-axis acceleration sensor having a high shock resistance, a small difference between outputs of piezo resistors of X-axis, Y-axis and Z-axis, a small size, high sensitivity and a high output. A flexible arm is composed of flexible widening parts and a flexible parallel part. The flexible widening part has a maximum stress part. The piezo resistors are arranged on an upper surface of the flexible arm so that a terminal of the piezo resistor is positioned at the maximum stress part. The Z-axis piezo resistors are positioned close to the width centerline of the flexible arm, while the X-axis and Y-axis piezo resistors are apart from the width centerline. Moreover, the Z-axis piezo resistors are shifted in the longitudinal direction of the flexible arm from the maximum stress part so as to reduce the output difference between the X-axis, Y-axis and Z-axis piezo resistors.


Find Patent Forward Citations

Takeyari, Tokuhisa. (2008). Semiconductor-type three-axis acceleration sensor (U.S. Patent No. 7331230). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7331230

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