The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2008
Filed:
Mar. 16, 2005
Frank Wirbeleit, Wappingers Falls, NY (US);
Tibor Bolom, Fishkill, NY (US);
Johannes Van Meer, Fishkill, NY (US);
Frank Wirbeleit, Wappingers Falls, NY (US);
Tibor Bolom, Fishkill, NY (US);
Johannes Van Meer, Fishkill, NY (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
Methods are provided for semiconductor devices having low contact resistance. The method in accordance with one embodiment of the invention comprises forming an insulating layer overlying a semiconductor substrate, the semiconductor substrate having a device region therein. An opening is formed through the insulating layer to expose a portion of the device region, and the portion of the device region is then electrically contacted by a metallic liner layer. To reduce the resistance of the liner layer and hence the contact, ions of a conductivity determining impurity are implanted into the metallic liner layer. A metal layer is then deposited overlying the metallic liner layer to fill the opening through the insulating layer and to form a conductive plug.