The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2008
Filed:
Jun. 16, 2005
Applicants:
Sung-il Cho, Seoul, KR;
Jong-kyu Kim, Seoul, KR;
Byeong-yun Nam, Gyeonggi-do, KR;
Kyeong-koo Chi, Seoul, KR;
Cheol-kyu Lee, Gyeonggi-Do, KR;
Inventors:
Sung-Il Cho, Seoul, KR;
Jong-Kyu Kim, Seoul, KR;
Byeong-Yun Nam, Gyeonggi-do, KR;
Kyeong-Koo Chi, Seoul, KR;
Cheol-Kyu Lee, Gyeonggi-Do, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8242 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a capacitor can include etching a metal-nitride layer in an environment comprising fluorine and oxygen to form a capacitor electrode.