The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
Mar. 18, 2005
Michael D. Casper, Nashua, NH (US);
William B. Mraz, Newfield, NH (US);
Michael D. Casper, Nashua, NH (US);
William B. Mraz, Newfield, NH (US);
UltraSource, Inc., Hollis, NH (US);
Abstract
A system and method for the fabrication of high reliability capacitors (), inductors (), and multi-layer interconnects () (including resistors ()) on various thin film hybrid substrate surfaces () is disclosed. The disclosed method first employs a thin metal layer () deposited and patterned on the substrate (). This thin patterned layer () is used to provide both lower electrodes for capacitor structures () and interconnects () between upper electrode components. Next, a dielectric layer () is deposited over the thin patterned layer () and the dielectric layer () is patterned to open contact holes () to the thin patterned layer. The upper electrode layers () are then deposited and patterned on top of the dielectric ().