The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
Sep. 01, 2006
Kenji Nishiyama, Yasu, JP;
Eiichi Takata, Nagaokakyo, JP;
Takeshi Nakao, Omihachiman, JP;
Michio Kadota, Kyoto, JP;
Kenji Nishiyama, Yasu, JP;
Eiichi Takata, Nagaokakyo, JP;
Takeshi Nakao, Omihachiman, JP;
Michio Kadota, Kyoto, JP;
Murata Manufacturing Co., Ltd., Kyoto, JP;
Abstract
A surface acoustic wave device includes a piezoelectric substrate made of LiTaOor LiNbOhaving an electromechanical coefficient of about 15% or more, at least one electrode which is disposed on the piezoelectric substrate and which is a laminate film having a metal layer defining a primary metal layer primarily composed of a metal having a density higher than that of Al or an alloy of the metal and a metal layer which is laminated on the primary metal layer and which is composed of another metal, and a first SiOlayer which is disposed in a remaining area other than that at which the at least one electrode is located and which has a thickness approximately equivalent to that of the electrode. In the surface acoustic wave device described above, the density of the electrode is at least about 1.5 times that of the first SiOlayer. In addition, a second SiOlayer disposed so as to cover the electrode and the first SiOlayer and a silicon nitride compound layer disposed on the second SiOlayer are further provided.