The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
Jan. 28, 2003
Akira Matsumoto, Basel, CH;
Hitoshi Yamato, Takarazuka, JP;
Toshikage Asakura, Minoo, JP;
Peter Murer, Allschwil, CH;
Akira Matsumoto, Basel, CH;
Hitoshi Yamato, Takarazuka, JP;
Toshikage Asakura, Minoo, JP;
Peter Murer, Allschwil, CH;
Ciba Specialty Chemicals Corporation, Tarrytown, NY (US);
Abstract
Chemically amplified photoresist compositions comprising, (a) a compound which cures upon the action of an acid or a compound whose solubility is increased upon the action of an acid; and (b) a compound of the formula (Ia), (Ib), (IIa), (IIb), (IIIa), (IIIb), (Iva), (Ivb), (Va), (Vb) or (VIa), wherein n is 1 or 2; m is 0 or 1; Xis —[CH]—X or —CH═CH; h is 2, 3, 4, 5 or 6; Rwhen n is 1, is for example optionally substituted phenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl; R, when n is 2, is for example optionally substituted phenylene or naphthylene; Rfor example has one of the meanings of R; X is for example —OR, —NRR, —SR; X' is -X-A-X-; Xand Xare for example —O—, —S— or a direct bond; Ais e.g. phenylene; Rhas for example one of the meanings given for R; Rhas for example one of the meaning given for R; Rand Re.g. are hydrogen; G i.a. is —S— or —O—; Rwhen n is 1, e.g. is phenyl, optionally substituted, when n is 2, is for example phenylene; Rand Re.g. are C-Calkyl; Rhas one of the meanings given for R; Ri.a. is C-Calkyl; R, R, R, RR, Rand Rfor example are hydrogen or C-Calkyl; R, R, Rand Ri.a are phenyl or C-Calkyl; give high resolution with good resist profile