The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
Oct. 31, 2002
Evangelos Gogolides, Athens, GR;
Panagiotis Argitis, Mellaala, Attiki, GR;
Elias Andrea Couladouros, Athens, GR;
Veroniki Petrou Vidali, Aghia Paraskevi, GR;
Maria Vasilopoulou, Aghia Paraskevi, Attiki, GR;
George Cordoyiannis, Athens, GR;
Evangelos Gogolides, Athens, GR;
Panagiotis Argitis, Mellaala, Attiki, GR;
Elias Andrea Couladouros, Athens, GR;
Veroniki Petrou Vidali, Aghia Paraskevi, GR;
Maria Vasilopoulou, Aghia Paraskevi, Attiki, GR;
George Cordoyiannis, Athens, GR;
Other;
Abstract
Mixed carbocycle derivatives containing at least two carbocycles per molecule from the group of anthracenes, adamantanes and steroids with functionalized carbon chains are synthesized and used as modifiers of resist properties and especially etch resistance enhancement and absorption characteristics. These derivatives are characterized by formulas I-V, where A and R may be an anthryl- and/or an adamantyl- and/or a steroid moiety. Methods for the preparation of the above compounds are disclosed.