The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
Jul. 01, 2004
Tae-jin Hwang, Yongin-si, KR;
Jae-hyun Yang, Gyeonggi-do, KR;
Jung-sung Hwang, Suwon-si, KR;
Hyun-joon Kim, Anyang-si, KR;
Yo-han Ahn, Yongin-si, KR;
Tae-Jin Hwang, Yongin-si, KR;
Jae-Hyun Yang, Gyeonggi-do, KR;
Jung-Sung Hwang, Suwon-si, KR;
Hyun-Joon Kim, Anyang-si, KR;
Yo-Han Ahn, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Abstract
An air-conditioning system of a substrate processing apparatus includes an air inlet line for providing air to a clean room. A contamination control apparatus for removing contaminants in the air is connected to the air inlet line. A controller controls temperature and humidity of the air without the contaminants. An air outlet line provides the air having the controlled temperature and humidity to a substrate processing chamber that is disposed in the clean room. The contamination control apparatus includes a spray unit having at least one nozzle that sprays water. At least one eliminator that traps the water for capturing contaminants in the air and drops the trapped water into a tank. A water circulation unit provides the water that includes an additive for controlling pH of the water to the spray unit.