The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
May. 04, 2004
Ramil A. Viluan, Baguio, PH;
Raymond M. Partosa, Baguio, PH;
Romulo D. Casallo, Jr., Baguio, PH;
Melvin B. Alviar, Baguio, PH;
Ramil A. Viluan, Baguio, PH;
Raymond M. Partosa, Baguio, PH;
Romulo D. Casallo, Jr., Baguio, PH;
Melvin B. Alviar, Baguio, PH;
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
Disclosed herein is a warp detection system () for determining warping in a carrier () configured to carry substrates () for processing. In one embodiment, the system () includes a guide plate () configured to guide a path of the carrier () during the processing, where the guide plate () is positioned underneath the carrier (). In addition, the system () includes a plurality of sensors () positioned within the guide plate (), wherein each of the plurality of sensors () is configured to measure a distance of a respective area of the carrier () from the guide plate (). Also in this embodiment, the system () includes a processing device () configured to receive the measured distances and determine warping in the carrier () based on differences between the measured distances. Also disclosed are a method of determining warping in a carrier () configured to carry substrates () for processing, and a method of manufacturing a warp detection system () for determining warping in a carrier () configured to carry substrates () for processing.