The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
May. 14, 2002
Yvon Pellegrin, Montpellier, FR;
Claude Giral, Montpellier, FR;
Yvon Pellegrin, Montpellier, FR;
Claude Giral, Montpellier, FR;
Semco Engineeering, Montpellier, FR;
Abstract
Device for automatically loading and unloading a feed to be treated in a heat treatment unit () such as a diffusion oven, comprising at least a cantilever () designed to receive the whole feed and to introduce the feed in the oven. The feed can consist of silicon wafers () arranged in quartz boats. The device comprises a multiple-basket automatic transfer equipment receiving on a reception zone, the whole feed, and transferring, from the reception zone to the cantilever, the whole feed and optionally dummy feeds, shielding feeds and control elements and vice-versa after the heat treatment, transferring the whole treated feed to the reception zone and transferring, from the cantilever to their original locations, the shielding feeds and the control elements, the various operations being carried out according to a predetermined scenario.