The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2008
Filed:
Aug. 26, 2004
Tsuyoshi Yokoyama, Kawasaki, JP;
Takeshi Sakashita, Kawasaki, JP;
Tokihiro Nishihara, Kawasaki, JP;
Tsutomu Miyashita, Kawasaki, JP;
Yoshio Satoh, Kawasaki, JP;
Tsuyoshi Yokoyama, Kawasaki, JP;
Takeshi Sakashita, Kawasaki, JP;
Tokihiro Nishihara, Kawasaki, JP;
Tsutomu Miyashita, Kawasaki, JP;
Yoshio Satoh, Kawasaki, JP;
Fujitsu Media Devices Limited, Yokohama, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A film bulk acoustic resonator includes: a piezoelectric thin film that is formed on a principal surface of a substrate; and a lower electrode and an upper electrode that are arranged to sandwich the piezoelectric thin film. In this film bulk acoustic resonator, the piezoelectric thin film is made of aluminum nitride, and at least one of the lower electrode and the upper electrode contains a ruthenium or ruthenium-alloy layer.