The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2008
Filed:
Mar. 16, 2005
Naoto Niisoe, Kyoto, JP;
Hiroe Ogata, Takatsuki, JP;
Rieko Nishio, Kyoto, JP;
Toshihiko Yano, Takaoka, JP;
Hitoshi Doi, Tonami, JP;
Naoto Niisoe, Kyoto, JP;
Hiroe Ogata, Takatsuki, JP;
Rieko Nishio, Kyoto, JP;
Toshihiko Yano, Takaoka, JP;
Hitoshi Doi, Tonami, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
On a light shielding film, an anti-oxidation layercovering at least the light shielding filmis formed. The anti-oxidation layeris formed under a condition which does not oxidize a surface of the light shielding film. The anti-oxidation layeris formed of a high melting point metal compound film having a light shielding property or an insulating film having a light transmissive property. Thus, the scattering ratio of the incident light at the surface of the light shielding filmcan be uniform among all the pixels, and as a result, a solid state imaging device having suppressed sensitivity non-uniformity can be realized. Since the surface of the light shielding filmis not oxidized, the thickness of the light shielding filmcan be reduced. Thus, the present invention can comply with the demand for size reduction of the pixels.