The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2008
Filed:
Aug. 29, 2003
Amanda Baer, Campbell, CA (US);
Marie-claire Cyrille, San Jose, CA (US);
Frederick Hayes Dill, South Salem, NY (US);
Wipul Pemsiri Jayaekara, Los Gatos, CA (US);
Jui-lung LI, San Jose, CA (US);
Hugo Alberto Emilio Santini, San Jose, CA (US);
Benjamin LU Chen Wang, San Jose, CA (US);
Amanda Baer, Campbell, CA (US);
Marie-Claire Cyrille, San Jose, CA (US);
Frederick Hayes Dill, South Salem, NY (US);
Wipul Pemsiri Jayaekara, Los Gatos, CA (US);
Jui-Lung Li, San Jose, CA (US);
Hugo Alberto Emilio Santini, San Jose, CA (US);
Benjamin Lu Chen Wang, San Jose, CA (US);
Hitachi Global Storage Technologies Netherlands B.V., Amsterdam, NL;
Abstract
A method for milling a structure. A single- or multi-layer resist having no undercut is added to a surface of a structure to be milled, the surface to be milled defining a plane. A milling process, such as ion milling, is performed. The milling process includes milling the structure at high incidence and milling the structure at razing incidence. The milling process can be performed only once, or repeated multiple times. High incidence can be defined as about 65 to about 90 degrees from the plane of the surface being milled. Razing incidence can be defined as about 0 to about 30 degrees from the plane of the surface being milled.