The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2008
Filed:
Jan. 24, 2006
Chantal Combi, Oggiono, IT;
Lorenzo Baldo, Bareggio, IT;
Dino Faralli, Milan, IT;
Flavio Francesco Villa, Milan, IT;
Chantal Combi, Oggiono, IT;
Lorenzo Baldo, Bareggio, IT;
Dino Faralli, Milan, IT;
Flavio Francesco Villa, Milan, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A manufacturing process of a semiconductor piezoresistive accelerometer includes the steps of: providing a wafer of semiconductor material; providing a membrane in the wafer over a cavity; rigidly coupling an inertial mass to the membrane; and providing, in the wafer, piezoresistive transduction elements, that are sensitive to strains of the membrane and generate corresponding electrical signals. The step of coupling is carried out by forming the inertial mass on top of a surface of the membrane opposite to the cavity. The accelerometer is advantageously used in a device for monitoring the pressure of a tire of a vehicle.