The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 22, 2008

Filed:

Jan. 07, 2004
Applicants:

Donald Umstadter, Ann Arbor, MI (US);

Fei He, Ann Arbor, MI (US);

Yue-ying Lau, Potomac, MD (US);

Inventors:

Donald Umstadter, Ann Arbor, MI (US);

Fei He, Ann Arbor, MI (US);

Yue-Ying Lau, Potomac, MD (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/00 (2006.01); H01S 3/09 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method and apparatus to generate a beam of coherent light including x-rays or XUV by colliding a high-intensity laser pulse with an electron beam that is accelerated by a synchronized laser pulse. Applications include x-ray and EUV lithography, protein structural analysis, plasma diagnostics, x-ray diffraction, crack analysis, non-destructive testing, surface science and ultrafast science.


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