The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2008
Filed:
Oct. 13, 2005
Yasuhito Sasaki, Utsunomiya, JP;
Yoshikazu Miyajima, Utsunomiya, JP;
Naosuke Nishimura, Utsunomiya, JP;
Hideo Tanaka, Utsunomiya, JP;
Toshihiko Nishida, Utsunomiya, JP;
Yasuhito Sasaki, Utsunomiya, JP;
Yoshikazu Miyajima, Utsunomiya, JP;
Naosuke Nishimura, Utsunomiya, JP;
Hideo Tanaka, Utsunomiya, JP;
Toshihiko Nishida, Utsunomiya, JP;
Abstract
A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile