The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2008
Filed:
Jul. 22, 2004
Frank Fischer, Gomaringen, DE;
Hans-peter Trah, Stuttgart, DE;
Franz Laermer, Weil Der Stadt, DE;
Lars Metzger, Moessingen-Belson, DE;
Frank Fischer, Gomaringen, DE;
Hans-Peter Trah, Stuttgart, DE;
Franz Laermer, Weil Der Stadt, DE;
Lars Metzger, Moessingen-Belson, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A device for manufacturing a capacitive pressure measurement includes an insulated base electrode, a mechanically deflectable counterelectrode composed of a layer made of at least one of a monocrystalline and polycrystalline semiconductor material, a contact arrangement for electrically connecting the electrodes, and at least one semiconductor component, all integrated onto a semiconductor substrate. The connection for the base electrode is formed by an electrically insulated conductive polycrystalline semiconductor layer. The method for manufactured the device includes the step of arranging a conductive polycrystalline semiconductor layer between two insulating layers on the semiconductor substrate for forming a base electrode.