The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2008
Filed:
Jan. 21, 2004
Gary S. Ash, Dartmouth, MA (US);
Allen J. Bartlett, Milford, MA (US);
James A. O'neil, Bedford, MA (US);
Bruce R. Andeen, Boxborough, MA (US);
Gary S. Ash, Dartmouth, MA (US);
Allen J. Bartlett, Milford, MA (US);
James A. O'Neil, Bedford, MA (US);
Bruce R. Andeen, Boxborough, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.