The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2008
Filed:
May. 10, 2006
Jin-woo Park, Hwaseong-si, KR;
Hong-jin Park, Yongin-si, KR;
Hyoung-min Park, Seoul, KR;
Young-hak Hwang, Seongnam-si, KR;
Yong-bum Park, Yongin-si, KR;
Jin-Woo Park, Hwaseong-si, KR;
Hong-Jin Park, Yongin-si, KR;
Hyoung-Min Park, Seoul, KR;
Young-Hak Hwang, Seongnam-si, KR;
Yong-Bum Park, Yongin-si, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
A management system for semiconductor manufacturing equipment in a manufacturing facility is provided. The system includes a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a radio tag associated with a wafer cassette. The tracking server is adapted to receive status information from the radio tag via the wireless network, to derive location or movement information for the wafer cassette from the status information, and to determining an optimal transfer path for the wafer cassette through the manufacturing facility.