The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2008
Filed:
Aug. 21, 2006
Applicants:
Mario Röder, Gelnhausen, DE;
Andreas Caspari, Seligenstadt, DE;
Cristof Klesen, Modautal, DE;
Inventors:
Assignee:
Leybold Optics GmbH, Alzenau, DE;
Primary Examiner:
Int. Cl.
CPC ...
B65G 35/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with actuators embodied in the form of electromagnets and a bearing rotor with a ferromagnetic component. At least two of the actuators are disposed at a distance from each other and define at least one pair of actuators with an associated gap area formed therebetween. An active magnetic bearing of the bearing rotor is provided in the gap area.