The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2008
Filed:
Nov. 13, 2003
Applicants:
Junji Sugamoto, Kanagawa, JP;
Norihiko Tsuchiya, Tokyo, JP;
Yukihiro Ushiku, Kanagawa, JP;
Katsujiro Tanzawa, Kanagawa, JP;
Inventors:
Junji Sugamoto, Kanagawa, JP;
Norihiko Tsuchiya, Tokyo, JP;
Yukihiro Ushiku, Kanagawa, JP;
Katsujiro Tanzawa, Kanagawa, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A treatment method of a semiconductor wafer includes treating the semiconductor wafer in a first solution having at least one kind of an oxidative acid and an oxidizing agent and treating the semiconductor wafer in a second solution having at least one of HF and NHF.