The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2008
Filed:
Dec. 29, 2004
Kazuo Nakajima, Kyoto, JP;
Masanobu Sato, Kyoto, JP;
Hiroaki Sugimoto, Kyoto, JP;
Akio Hashizume, Kyoto, JP;
Hiroki Tsujikawa, Kyoto, JP;
Kazuo Nakajima, Kyoto, JP;
Masanobu Sato, Kyoto, JP;
Hiroaki Sugimoto, Kyoto, JP;
Akio Hashizume, Kyoto, JP;
Hiroki Tsujikawa, Kyoto, JP;
Abstract
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the arm at a prescribed distance from the soft spray nozzle. During cleaning, it follows that both nozzles discharge detergents while keeping relative layout relation. Therefore, the discharged cleaning mist and rinsing deionized water do not interfere with each other before reaching the substrate but the used detergents are entirely horizontally splashed and recovered in a cup. Thus, the cleaning mist is prevented from scattering and adhering to the periphery.