The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2007
Filed:
Oct. 11, 2006
Eric Wintenberger, Beachwood, OH (US);
Douglas Alan Longworth, Brecksville, OH (US);
Wei Fan, Middleburg Heights, OH (US);
John Thomas Mariner, Avon Lake, OH (US);
Eric Wintenberger, Beachwood, OH (US);
Douglas Alan Longworth, Brecksville, OH (US);
Wei Fan, Middleburg Heights, OH (US);
John Thomas Mariner, Avon Lake, OH (US);
Momentive Performance Materials Inc., Wilton, CT (US);
Abstract
A heat treatment apparatus for use in batch heating/wafer processing is provided, which comprises a process chamber for receiving a wafer boat, at least a heating element comprising a substrate body configured to form an electrical heating circuit for at least one heating zone and encapsulated in a continuous overcoat layer, a heat reflector comprising a heat reflective surface disposed on the heating element, and the heating element has a ramp rate of at least 1° C. per second for heating the wafers in the wafer boat.