The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2007

Filed:

Dec. 20, 2005
Applicants:

Jeffrey Scott Cites, Horseheads, NY (US);

Charles Michael Darcangelo, Corning, NY (US);

Steven Joseph Gregorski, Painted Post, NY (US);

Richard Orr Maschmeyer, Corning, NY (US);

Mark Andrew Stocker, Painted Post, NY (US);

John Christopher Thomas, Elmira, NY (US);

Inventors:

Jeffrey Scott Cites, Horseheads, NY (US);

Charles Michael Darcangelo, Corning, NY (US);

Steven Joseph Gregorski, Painted Post, NY (US);

Richard Orr Maschmeyer, Corning, NY (US);

Mark Andrew Stocker, Painted Post, NY (US);

John Christopher Thomas, Elmira, NY (US);

Assignee:

Corning Incorporated, Corning, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of polishing a semiconductor layer formed on a transparent substrate is described, the method including measuring the thickness of the semiconductor from the substrate side of the semiconductor layer simultaneously with the polishing, and using the thickness measurement to modify the polishing.


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