The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2007
Filed:
Sep. 29, 2003
Yorinobu Kunimune, Kanagawa, JP;
Yorinobu Kunimune, Kanagawa, JP;
NEC Electronics Corporation, Kanagawa, JP;
Abstract
A pair of pads is formed on an insulating layer formed on a top surface of a substrate, and a plurality of through-holes is laid out at equal intervals between the pads. Adjoining through holes are connected alternately by upper-layer wire interconnect lines exposed on the insulating layer or lower-layer wire interconnect lines buried in the insulating layer, thus constituting a check pattern. A DC power supply is connected between the pair of pads, and a constant current is supplied to a chain pattern of the through holes. Two probes move on a chip surface along the chain pattern of the through holes while keeping a given interval spacing. The probes sequentially scan the upper-layer wire interconnect lines exposed through the chip surface of the chain pattern of the through-holes.