The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Dec. 22, 2005
Yasunori Ikeno, Cupertino, CA (US);
Yasutoshi Kitahara, Ina, JP;
Shunsuke Kurata, Kamiina-gun, JP;
Yoshiaki Suge, Kamiina-gun, JP;
Yasunori Ikeno, Cupertino, CA (US);
Yasutoshi Kitahara, Ina, JP;
Shunsuke Kurata, Kamiina-gun, JP;
Yoshiaki Suge, Kamiina-gun, JP;
Olympus Corporation, Tokyo, JP;
Abstract
A substrate inspection apparatus includes a recipe preparation unit that batch-allocates a plurality of slots containing substrates of each type with a corresponding one of a plurality of original recipes to the each type, the plurality of original recipes corresponding to different types of substrates respectively, so as to prepare an actual recipe based on the plurality of original recipes, and to inspect the different types of substrates according to the actual recipe.