The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Apr. 10, 2007
Dominique Ausserre, Soultre, FR;
Marie-pierre Valignat, Boulogne, FR;
Dominique Ausserre, Soultre, FR;
Marie-Pierre Valignat, Boulogne, FR;
Centre National de la Recherche Scientifique (CNRS), Paris, FR;
Universite Pierre et Marie Curie, Paris, FR;
Abstract
This invention concerns a device for ellipsometric two-dimensional display of a sample placed in an incident medium, observed between a convergent light cross-reflected analyser and polarizer, wherein the ellipsometric parameters of the ensemble formed by the sample and a substrate whereon it is placed, are processed. The substrate comprises a base and a stack of layers of base and its ellipsometric properties are known. The ellipsometric properties of the substrate are such that the variations of the ellipsometric parameters of the sample are displayed with a contrast greater than the contrast produced in the absence of such substrate. The invention also concerns a display method and an ellipsometric measurement method with spatial resolution.