The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Jun. 17, 2003
Mitsunori Toyoda, Chiyoda-ku, JP;
Mitsunori Toyoda, Chiyoda-ku, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An illumination optical device, wherein a micro channel is not generated practically in a diffractive optical element arranged in an optical path of pulse laser light having high energy density. An illumination optical device having a light source () for supplying pulse laser light, wherein an irradiated plane (M) is illuminated with light from this light source. The illumination optical device comprises a diffractive optical element () arranged in an optical path between a light source and an irradiated plane, through which a light beam having an energy density of 1 mJ/cm/pulse or more passes. The diffractive optical element is formed by an oxide crystal material such as quartz crystal.