The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Mar. 10, 2005
Ki-beom Lee, Kyungki-Do, KR;
Jae-ku Lee, Kyungki-Do, KR;
Mi-sun Park, Kyungki-Do, KR;
Jong-min Kim, Kyungki-Do, KR;
Min-gun Lee, Kyungki-Do, KR;
Ki-Beom Lee, Kyungki-Do, KR;
Jae-Ku Lee, Kyungki-Do, KR;
Mi-Sun Park, Kyungki-Do, KR;
Jong-Min Kim, Kyungki-Do, KR;
Min-Gun Lee, Kyungki-Do, KR;
Dongjin Semichem Co., Ltd., Incheon, KR;
Abstract
A system and a method for controlling the multi-component composition such as photoresist, stripper, developer, etchant, thinner, rinser/cleaner and etch bead remover, for a lithography process, which is used for manufacturing a semiconductor device, a liquid crystal display device and so on, are disclosed. The system includes a composition circulator for withdrawing the composition from a storage tank retaining the composition for a lithography process, and for recycling the withdrawn composition to the storage tank, through a flow cell; a composition analyzer for measuring an absorbance of the composition passing through the flow cell, and for calculating the concentration of at least one component of the composition from the measured absorbance; a component supplier for supplying a deficient component to the storage tank when a concentration of the deficient component is below a predetermined level; and a controller for controlling the component supplier to adjust the concentration of each component of the composition according to the absorbance.