The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2007

Filed:

May. 16, 2005
Applicants:

George C. Feng, Poughkeepsie, NY (US);

Louis L. Hsu, Fishkill, NY (US);

Rajiv V. Joshi, Yorktown Heights, NY (US);

Inventors:

George C. Feng, Poughkeepsie, NY (US);

Louis L. Hsu, Fishkill, NY (US);

Rajiv V. Joshi, Yorktown Heights, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method (and structure) that selectively forms a dielectric chamber on an electronic device by forming a dummy structure over a semiconductor substrate, depositing a dielectric layer over the dummy structure, forming an opening through the dielectric layer to the dummy structure, and removing the dummy structure to form the dielectric chamber.


Find Patent Forward Citations

Feng, George. (2007). Structure and method for forming a dielectric chamber and electronic device including the dielectric chamber (U.S. Patent No. 7307011). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7307011

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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