The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Jan. 31, 2003
Applicants:
Mario Visca, Alessandria, IT;
Alba Chittofrati, Novara, IT;
Fiorenza D'aprile, Milan, IT;
Inventors:
Assignee:
Solvay Solexis S.p.A., Milan, IT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
Use in etching or polishing of integrated circuits of fluorinated additives of formula (I):(CFO)()  (I)having a number average molecular weight in the range 250–400, in particular of the compound Cl(CF—CF(CF)O)CFCOONa.