The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2007

Filed:

Apr. 08, 2004
Applicant:

Teruaki Kasai, Chikushino, JP;

Inventor:

Teruaki Kasai, Chikushino, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); H01L 21/46 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor chip pick-up apparatus includes: a pick-up head for picking up the chip on a sheet; a holding table for holding the sheet; a recognition means for recognizing the chip; a positioning means for positioning the chip relatively to the pick-up head on the basis of the recognition result by the recognition means; and a sheet separating mechanism for separating the sheet from the chip by sucking the sheet from a suction plane brought in contact with a lower surface of the sheet. The sheet separating mechanism includes: a plurality of sucking grooves formed in the suction plane; a plurality of boundary zones, each of which separates the sucking grooves adjacent to each other and supports the sheet in their contact with the lower surface of the sheet during sucking; suction members movably arranged in the sucking grooves, respectively so that when they are moved toward lower surface of the sheet, they are brought into contact with the lower surface of the sheet to suck the sheet; a moving means for moving the suction members; and a sucking means for sucking the sheet from said plurality of sucking grooves.


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