The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Dec. 06, 2002
Bernhard Vogeli, Boston, MA (US);
Timothy A. Savas, Cambridge, MA (US);
Henry I. Smith, Sudbury, MA (US);
Caroline A. Ross, Boston, MA (US);
Bernhard Vogeli, Boston, MA (US);
Timothy A. Savas, Cambridge, MA (US);
Henry I. Smith, Sudbury, MA (US);
Caroline A. Ross, Boston, MA (US);
Massachusetts Institute of Technology, Cambridge, MA (US);
Abstract
A micro-fabricated structure and method of forming a micro-fabricated structure are disclosed. The method includes the steps of forming a first pattern in a first photo-resist, transferring the first pattern in the first photo-resist to a mask layer, forming a second pattern in a second photo-resist, and transferring the second pattern in the second photo-resist to the mask layer. In various embodiments, the method may further include the steps of forming a first pattern in a first photo-resist, forming a second pattern in a second photo-resist, and transferring the first and second patterns to a target layer.