The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Feb. 10, 2003
Applicants:
Heikki Kuisma, Helsinki, FI;
Juha Lahdenperä, Espoo, FI;
Risto Mutikainen, Espoo, FI;
Inventors:
Assignee:
VTI Technologies Oy, Vantaa, FI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 7/16 (2006.01); G01L 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a sensor including forming an insulating layer on top of a conductive substrate, and forming a conducting electrode on top of the insulating layer. Further, the insulating layer is formed to include support areas formed at edges of the conducting electrode and a partial area formed under the conducting electrode, and a thickness (d) of the partial area of the insulating layer is less than a thickness (d) of the support areas of the insulating area.