The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Mar. 10, 2005
Anthony S. Kourepenis, Acton, MA (US);
Marc S. Weinberg, Needham, MA (US);
Richard Elliott, Stoneham, MA (US);
Steven Daley, Allston, MA (US);
Anthony S. Kourepenis, Acton, MA (US);
Marc S. Weinberg, Needham, MA (US);
Richard Elliott, Stoneham, MA (US);
Steven Daley, Allston, MA (US);
The Charles Stark Draper Laboratory, Inc., Cambridge, MA (US);
Abstract
A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.