The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Aug. 11, 2005
Takeshi Ito, Okazaki, JP;
Minoru Murata, Okazaki, JP;
Takeshi Ito, Okazaki, JP;
Minoru Murata, Okazaki, JP;
Nippon Soken, Inc., Nishio, JP;
DENSO CORPORATION, Kariya, JP;
Abstract
An angular rate sensor includes: a support substrate; a semiconductor layer; and a movable portion. The movable portion includes a driving vibration portion and a detecting vibration portion. The driving vibration portion is capable of vibrating in a first direction. The detecting vibration portion is capable of vibrating in a second direction. The driving vibration portion includes through holes, and the detecting vibration portion includes thorough holes. Each through hole of the driving vibration portion has an elongated shape extending in the first direction. Each through hole of the detecting vibration portion has an elongated shape extending in the second direction.