The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Apr. 22, 2005
David Treves, Palo Alto, CA (US);
Thomas A. O'dell, Campbell, CA (US);
David Treves, Palo Alto, CA (US);
Thomas A. O'Dell, Campbell, CA (US);
Komag, Inc., San Jose, CA (US);
Abstract
An optical test head comprises a block of material with a plurality of optical paths extending therethrough. At least one of the optical paths is an input optical path for receiving laser light and holding a lens for focusing the laser light on a workpiece that is proximate the head. At least another of the optical paths is an output path for receiving light that is reflected off of the workpiece and providing that light to a detector. (In one embodiment, several detectors are provided to direct specularly reflected light, narrow angle scattered light, wide angle scattered light and back scattered light to associated detectors.) Other optical elements can be affixed within or to the block of material. The test head can be used without requiring the individual optical elements to be aligned or adjusted.